Effects of Ion Incident Angles on Etching Morphology of Blazed Grating by IBE

Abstract

The blazed grating plays an important role in advanced fields such as spectroscopy, AR, VR, etc. Therefore, a good morphology is critical for its applications. This paper mainly studies the effects of different ion incident angles on the morphology of the etched blazed gratings. The blazed gratings were fabricated by ion beam etching (IBE) and their morphologies were characterized by scanning electron microscopy (SEM). The results show that with the increase of the incident angle of the ion beam, the blazed angle first increased and then decreased, this is caused by different etching selectivities. Our study is of great significance for fabricating blazed gratings with high diffraction efficiency.