Abstract
The influence of plasma conditions and ion optics of the only commercially available electron gas Secondary (or Sputtered) Neutral(s) Mass Spectrometry (SNMS) instrument Leybold INA3 on relative element sensitivity factors and on the flatness of sputter craters is investigated. For III–V-compounds with mass differences up to 84 amu it is found that realistic plasma and optics variations are, inter alia, the reason for the spread of sensitivity factors by up to a factor of 3 on one and the same instrument. Changes of plasma conditions, for which bombardment voltage has been optimized with respect to crater flatness in the direct bombardment mode, require changes of the bombardment voltage roughly proportional to the ion saturation current on the Langmuir probe.
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