Abstract
We examined reactive pulsed laser ablation of silicon target in hydrogen atmosphere to form hydrogenated silicon nanoparticles. A correlation between hydrogen pressure and sample properties or structure was investigated by varying hydrogen pressure from 5 to 532 Pa. We could form hydrogenated silicon nanoparticles above 30 Pa. The size of nanoparticles could be changed by controlling hydrogen pressure. The bonding configuration of silicon and hydrogen changes between 20 and 30 Pa, which is demarcation of the sample structure from film-like to nanoparticles. These results imply reactive laser ablation has a possibility to produce a well-designed sample both size and bonding configuration.
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