Abstract
The copolymer of methyl methacrylate (MMA) and t‐butyl methacrylate (tBMA), CP‐3‐2 showed a high performance (sensitivity 0.3 μC/cm2, and resolution 0.3 μm line) for positive electron beam resist by the heat‐treatment at 250°C. Some heat‐treatment effects were observed: weight loss, improvement of thermal properties, and decrease of molecular weight occurred, and the chain scission efficiency (G‐value) increased from 1.8 to 3.3 by heat‐treatment at 250°C. Moreover, the composition changes of the CP‐3‐2 for the heat‐treatment temperature were measured with an FT‐IR, 13C‐ and 1H‐NMR. The results showed that t‐butyl groups of the tBMA component were eliminated above 220°C, and six‐membered acid anhydrides were formed. Furthermore, elimination of methoxy groups of the MMA were also observed.
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