Abstract
(Received October 14 2009, Revised November 30 2009, Accepted December 15 2009) The effects of the growth temperature on the properties of ZnO thin films were investigated by using X-ray diffraction, scanning electron microscopy, ultraviolet-visible spectrophotometry, and Hall measurements. The ZnO films were deposited by rf magnetron sputtering at various growth temperatures in the range of 100-400
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More From: Transactions on Electrical and Electronic Materials
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