Abstract

Identical GaN/AlN resonant tunneling diode structures were grown on free-standing bulk GaN at substrate temperatures of 760 °C, 810 °C, 860 °C, and 900 °C via plasma-assisted molecular beam epitaxy. Each sample displayed negative differential resistance (NDR) at room temperature. The figures-of-merit quantified were peak-to-valley current ratio (PVCR), yield of the device with room-temperature NDR, and peak current density (Jp). The figures-of-merit demonstrate an inverse relationship between PVCR/yield and Jp over this growth temperature series. X-ray diffraction and transmission electron microscopy were used to determine the growth rates, and layer thicknesses were used to explain the varying figures-of-merit. Due to the high yield of devices grown at 760 °C and 810 °C, the PVCR, peak voltage (Vp), and Jp were plotted vs device area, which demonstrated high uniformity and application tunability. Peak current densities of up to 1.01 MA/cm2 were observed for the sample grown at 900 °C.

Highlights

  • ΔI and ΔV are the differences between the peak and valley currents and voltages, respectively, of the negative differential resistance (NDR) region

  • Due to the high yield of devices grown at 760 ○C and 810 ○C, the peak-to-valley current ratio (PVCR), peak voltage (Vp), and Jp were plotted vs device area, which demonstrated high uniformity and application tunability

  • There have been reports of peak tunneling current densities in GaN-based resonant tunneling diodes (RTDs) ranging from 100 kA/cm2 up to 930 kA/cm211,15,16,18,19 their respective peak-to-valley current ratios (PVCRs) are low, which translates to small ΔI

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Summary

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Superior growth, yield, repeatability, and switching performance in GaN-based resonant tunneling diodes Applied Physics Letters 116, 113501 (2020); https://doi.org/10.1063/1.5139219 930 kA/cm2 peak tunneling current density in GaN/AlN resonant tunneling diodes grown on MOCVD GaN-on-sapphire template Applied Physics Letters 114, 203503 (2019); https://doi.org/10.1063/1.5095056 Dependence of growth temperature on the electrical properties and microstructure of MBE-grown AlN/GaN resonant tunneling diodes on sapphire Journal of Vacuum Science & Technology B 38, 032214 (2020); https:// doi.org/10.1116/6.0000052

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