Abstract
The effects of “growth interruption” on the structure of an MBE grown GaAs/AlAs superlattice were studied by X-ray diffraction measurements using anomalous scattering for gallium and arsenic atoms. The results revealed that “Growth Interruption” improves the distribution of periods of the superlattice and that the period is decreased due to the re-evaporation of Ga-As layers during the interruption.
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