Effects of Glass Beads Packing on SF6 Abatement by Packed Bed Plasma

Abstract

This article investigated the effects of SF6 degradation by packed bed DBD (PBDBD) with packing material of glass beads (diameter of 4 mm). The results show that the packing materials effectively increased the discharge voltage and discharge current amplitudes and promote the generation of filamentary discharges. In addition, the packing materials promoted the charge transfer process between the reactor electrodes and shortened the charge time in one DBD discharge cycle. SF6 degraded more thoroughly in the packed bed reactor (PBR). The energy yield of the SF6 abatement in PBR reached up to 17.1 g/kWh with a degradation rate of 88.6%. The degradation by-products of SF6 were mainly SO2F2, SOF2, SO2, OF2, SOF4 and SiF4. After NaOH solution scrubbing, the residual gas contained SO2F2 and SOF4 which need further treatment. The experimental results show that PBDBD with glass beads as packing materials has a potential for the application of SF6 waste gas treatment.