Abstract

Amorphous-Si/SiO 2 superlattices have been grown using the two-target alternation magnetron sputtering technique. The thickness of the SiO 2 layers in all the superlattices was 2.0 nm and that of the Si layers in nine types of the superlattice ranged from 0.6 to 3.8 nm in steps of 0.4 nm. Visible electroluminescence (EL) spectra of Au/amorphous-Si/SiO 2 superlattices/p-Si structures with Si layers of nine different thicknesses showed a peak located at 650 nm. After gamma irradiation, the EL peak increased 2.5 times in intensity. Moreover, a strong new 470 nm blue peak emerged from the EL spectra in all the Au/amorphous-Si/SiO 2 superlattices/p-Si structures. The experimental results indicate that the EL recombination process mainly originates from luminescence centers in the SiO 2 layers rather than from the Si layers in the superlattices.

Full Text
Paper version not known

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.