Effects of film thickness and contact load on nanotribological properties of sputtered amorphous carbon thin films

Abstract

The nanotribological properties of amorphous carbon (a-C) films of thickness in the range of 5–85nm sputtered on Si(100) substrates were investigated with a surface force microscope (SFM), using a Berkovich diamond tip of nominal radius of curvature approximately equal to 200nm and contact (normal) loads between 10 and 1200μN. The dependence of the friction and wear behaviors of the a-C films on normal load and film thickness was studied in terms of nanomechanical properties, images of scratched surfaces, and numerical results obtained from a previous analytical friction model. The increase of the contact load caused the coefficient of friction to decrease initially to a minimum value and, subsequently, to increase to a maximum value, after which, it either remained constant or decreased slightly. The dominant friction mechanism in the low-load range was adhesion, while both adhesion and plowing mechanisms contributed to the friction behavior in the intermediate- and high-load ranges. Thinner (thicker) a-C films yielded higher (lower) friction coefficients for normal loads less than 50μN (low-load range) and lower (higher) friction coefficients for normal loads greater than 150μN (high-load range). Elastic and plastic deformation, microcracking, and delamination of the a-C films occurred, depending on the contact load and film thickness ranges. The reduced load-carrying capacity, relatively low effective hardness (strength) obtained with thinner films, and dominant friction and wear mechanisms at each load range illustrate the film thickness and contact load dependence of the nanotribological properties of the sputtered a-C films.