Effects of Fabrication Parameters on Porous p+-Type Silicon Morphology

Abstract

The effects of fabrication parameters on porous silicon morphology have been investigated using small-angle X-ray scattering and gas adsorption methods to understand the dependences of the parameters on each other. The dependence of the specific surface areas on current density was studied using three different electrolytes varying with hydrofluoric acid concentrations. The maximum of the surface area for each concentration was observed and a general tendency for these maxima was found. The largest specific surface area observed in this work was obtained using HF–water electrolyte without ethanol and 140 mA/cm2 current density. On the contrary, the largest average pore size was found in the sample prepared using the highest ethanol concentration.