Abstract
BaxSr(1−x)TiO3(BST) films are deposited on titanium substrate by micro-arc oxidation (MAO) technique under three electrolytes. The micro-structure and electrical properties of the BST thin films are analyzed and compared. The results show that the BST films obtained with these three electrolytes are all mainly composed of tetragonal BaxSr(1−x)TiO3. Compared with electrolyte without additive, both PVP30 and EDTA, as additive, significantly inhibit the growth of BST films, and the BST films become flat and dense. Moreover, the dielectric and ferroelectric properties of BST thin films are positively correlated with their micro-structure, and flat and dense BST film possesses good dielectric and ferroelectric properties. The residual polarization intensity of BST film prepared with the electrolyte involving PVP30 or EDTA is about 18 and 13 times of that of BST film prepared without additive, respectively.
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