Abstract

We present here an analysis of the discharge characteristics of a He plasma jet operating under three different types of applied voltage waveform: (a) a μs-pulse voltage waveform with a slow voltage rise time, (b) ns-pulse, and (c) rectangular voltage waveforms with fast voltage rise time. Optical emission measurements show that the application of a voltage with a fast voltage rise time induces rapid discharge growth and, consequently, produces an abundance of energetic electrons, which in turn leads to high optical emission from the O atoms. We also estimate the optical emission efficiency of the O atom (ηo), which corresponds roughly to the production efficiency of the reactive O species. ηo increases with increasing applied voltage, and the highest value of ηo is obtained in the shortest pulse discharge, which was ignited by a ns-pulse voltage waveform with a fast voltage rise time and short pulse width.

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