Abstract

Single-crystal sapphire (α-Al2O3) is a hard and brittle material. Due to its highly crystalline nature, the fracture behavior of sapphire is strongly related to its crystal structure, and understanding the effects of crystal structure on the crack propagation of sapphire is essential for the successful application of this important material (e.g., as wafers in the electronics industry). In the present work, crack propagation that is induced by sequential indentation was investigated on the A-plane and C-plane of sapphire using a Vickers indenter on a micrometer scale. It was found that increasing indentation depth obviously increases the rate of crack propagation on the A-plane, but this effect is not so obvious on the C-plane because of the different slip systems induced by indentation on the different crystal planes of sapphire. Moreover, some parallel linear traces along the A-plane, which fracture with increasing indentation depth, are observed from the residual indentation on the A-plane. The fracture toughness of both A-plane and C-plane sapphire is smaller after indentation testing than that obtained using conventional testing methods. The subsurface damage was detected by transmission electron microscopy (TEM).

Highlights

  • Single-crystal sapphire (α-Al2 O3 ) is one of the hardest natural minerals [1,2], and is widely used in industry, national defense, aerospace, and scientific research fields due to its superior chemical and physical properties [3,4]

  • The results demonstrated that dynamic indentations result in shorter and less jagged cracks accompanied by increased localized spalling beneath each indentation site

  • The objective of the present work is to investigate the effect of crystal orientation on the crack propagation of A-plane and C-plane sapphire based on the application of sequential-loading-unloading indentation tests on the A-plane and C-plane, respectively

Read more

Summary

Introduction

Single-crystal sapphire (α-Al2 O3 ) is one of the hardest natural minerals Mao et al [2] studied the elastic-plastic characteristics of the C plane of single-crystal sapphire by means of ultra-low nanoindentation loads using a Berkovich indenter with an indentation depth of less than 60 nm. Numerous studies have investigated the nanomechanical properties of some other single-crystal materials [10,11,12,13] These studies have been predominantly conducted at the nanometer scale, which is more representative for precision machining. The objective of the present work is to investigate the effect of crystal orientation on the crack propagation of A-plane and C-plane sapphire based on the application of sequential-loading-unloading indentation tests on the A-plane and C-plane, respectively. The crack fracture mechanisms obtained by sequential indentation tests on A-plane and C-plane sapphire wafers are analyzed according to the surface morphology, residual indentation depths, fracture toughness, and crack propagation behavior. The subsurface damage was detected by transmission electron microscopy (TEM)

Experimental Procedures
Schematic
Nanoindentation Results
Typical
Analysis of Indentation Fracture Morphology
Figureindentation
Objective
Subsurface Damage Analysis by TEM
Conclusions
Full Text
Published version (Free)

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call