Effects of Cooling Rates on Crystal Orientation of Sputtered PbTiO3 and (Pb,La)TiO3 Thin Films.

Abstract

Thin films of PbTiO3 (PT) and (Pb, La)TiO3 (PLT) were grown at 600oC on (100)MgO substrates by rf-magnetron sputtering. The crystal orientation of the PT thin films was investigated with various cooling rates (8oC/min to 33oC/min). It is found that the degree of c-axis orientation of the PT thin films increases with increasing cooling rates and the degree of a-axis orientation increases with decreasing cooling rates. While, c-axis orientation of the PLT thin films is grown independent of the cooling rates. The cooling rates are essential for the control of the orientation of the PT thin films on (100)MgO substrates.