Effects of cobalt deposition and pretreatment process on electrical properties of products

Abstract

The preferable conditions for formation of high quality CoSi2 films and effect of process parameters on properties of products were investigated. The pretreatment should not only remove the natural oxide layer completely, but also could not damage Si substrate. The good static random access memory (SRAM) proportion of products is high when pretreatment thickness is 20 Å, reached 96.5%. The radio frequency (RF) bias power process parameter should also take an optimal value. When RF bias power is 150 W, the good SRAM proportion of products is greater than 98%. The 100 Å Co can just completely react with Si substrate after twice annealing (500 °C 30 s and 750 °C 30 s), and if it exceeds 100 Å, Co will be residual. Decreasing Co thickness leads to contact resistance (RC) increase whatever in N-well or P-well. The overall standby current (Isb) of product is least when Co thickness is 80 Å. Finally, the products achieved good electrical properties when Co thickness is 80 Å, pretreatment thickness is 20 Å and RF bias power is 150 W.