Abstract
High-entropy (CrNbSiTiZr)Cx coatings were successfully fabricated by reactive radio-frequency magnetron sputtering using an equimolar CrNbSiTiZr alloy target under CH4-containing Ar flow. The effect of the CH4 flow ratio on the chemical composition, microstructure, mechanical and tribological properties of (CrNbSiTiZr)Cx coatings was investigated. The carbon content in the coatings varied from 36.7 at% to 87.8 at% with an increasing CH4 flow ratio from 3% to 20%. The (CrNbSiTiZr)Cx coatings revealed a simple NaCl-type FCC (face-centered cubic) structure. The maximum hardness of 32 GPa was obtained at the carbon content of 36.7 at% by applying substrate bias of −100 V. On the other hand, the coating with high carbon content of 87.8 at% possessed superior wear resistance, which friction coefficient and wear rate were, respectively, 0.07 and 2.0 × 10−7 mm3/N·m.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
