Abstract
In this paper, the nonlinear dynamics equations of a multi-field coupled orthotropic micro film are presented. The Krylov-Bogoliubov-Mitropolsky (KBM) method is used to solve the equations. The multi-fields coupled nonlinear resonant frequencies of a micro film are analyzed. The effects of Casimir force and nonlinear parameter on nonlinear resonant frequencies and vibration amplitudes are investigated. A resonant film is designed and produced. Based on the principle of electrostatic excitation and capacitance detection, the resonant frequency of the micro film is detected. It illustrates that the Casimir force has an important influence on the resonant micro film frequencies and should be considered with a small initial clearance.
Highlights
Micro-electro-mechanical systems (MEMS) mainly include micro-sensors, micro-actuators and processing circuits [1, 2]
Among the micro-sensors, resonant sensors output frequency signals in which the distortion will not occur in the long-distance transmission, and the signal processing circuits can be simplified largely so that they are widely used in automobile, intelligent equipment, chemical industry, quality and process control, fragrance design, oenology, etc [4]
The Casimir force and electrostatic force correspond to two springs in series, so the Casimir force can lead to a decrease of the nonlinear resonant frequencies just like the electrostatic force
Summary
Micro-electro-mechanical systems (MEMS) mainly include micro-sensors, micro-actuators and processing circuits [1, 2]. In 1993, Alonso studied the vibration characteristics for a resonator made with NiCr thin film micro resonance pressure sensor [8]. Fan studied the nonlinear vibration of a micro resonant pressure sensor. In 2009, Reutskiy developed a new method of numerical analysis of the nonlinear film vibration. EFFECTS OF CASIMIR FORCE ON MULTI-FIELD COUPLED NONLINEAR VIBRATION OF ORTHOTROPIC MICRO FILM. To predict the resonant frequency and its fluctuations of the micro film resonator accurately, the multi-field coupled vibration problem under the influence of molecular force should be investigated. The nonlinear vibration frequency and displacement response of the micro film resonator are investigated. Effects of the Casimir force on the nonlinear vibration frequency for the micro film resonator are determined.
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