Abstract
SU-8, an epoxy-based negative photoresist polymer, is highly suitable for making micro-electro-mechanical systems (MEMS) structures. Despite fabrication advantages, its bulk mechanical and tribological properties are the main limitations for application as MEMS material. Carbon filler materials such as graphene, graphite and multi-walled carbon nanotube (MWCNT) are added to SU-8 for tribological and mechanical property enhancements. SU-8/(5 wt%) graphite composite has performed better for the steady-state coefficient of friction at all loads including for the speed effect. SU-8/(5 wt%) MWCNT has shown excellent wear resistance. At 10 wt% graphite content, SU-8/graphite is superior in tribological performance to other composites tested.
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