Abstract
In this study, influence of carbon impurities on characteristics of ALD-YSZ films is systematically investigated. Carbon concentration in ALD-YSZ films was controlled by changing Y2O3 ratio in YSZ super cycle. To examine electrochemical characteristics of ALD-YSZ films, nano-porous templates based thin film solid oxide fuel cells (TF-SOFCs) were fabricated with ALD-YSZ thin film electrolyte and examined at 500°C. Open circuit voltages (OCVs) of TF-SOFCs with ALD-YSZ were clearly dependent on carbon contaminations. High carbon concentration caused leakage current through internal short circuit, and then, OCVs of TF-SOFCs were decreased. Post-processing of ALD-YSZ thin film electrolyte improved OCVs of TF-SOFCs.
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