Abstract
The TiAlSiBN nanocomposite films with the boron (B) content ranging from 1.95 at.% (atom percent) to 10.58 at.% were synthesized by reactive magnetron sputtering. The effects of B content on the microstructure and mechanical properties of TiAlSiBxN films were studied by x-ray diffraction, high-resolution transmission electron microscopy, scanning electron microscopy and nanoindentation techniques. The results show that the nanocomposite structure forms within the TiAlSiBxN films. With the increase in B content, the crystallinity and mechanical properties first increase and then decrease. When the B content (x) rises to 0.12, a coherent growth structure is created between nanocrystallites and interfaces, leading to the improvement of crystallinity and effective strengthening effect, with the maximal hardness and elastic modulus of 38.9 and 391 GPa, respectively. The TiAlSiBN nanocomposite films present potential industrial applications as a protective coating.
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