Effects of Bath Composition and Current Density on the Electrodeposition Behavior of Fe–Ni Invar Alloy

Abstract

Fe–Ni invar alloy (Fe 64–Ni 36 wt%) has a very low coefficient of thermal expansion (CTE) than any other metals. For this reason, it has been used as fine metal mask (FMM) in RGB patterning of OLED manufacture process. However, as the resolution of OLED display is getting higher, the thickness of FMM is getting thinner and then the conventional extruded invar sheet cannot be used directly. The electrodeposition of invar can be the alternative for fabrication of thin FMM. In this study, the Fe–Ni alloy were electrodeposited varying bath compositions and current density. Also, the effects of ferric ion (Fe3+), produced during electrodeposition on inert anode, on the behavior of deposition were investigated. Finally, the Fe–Ni alloy with 36–40 wt% Ni were obtained at 50 mA/cm2 in 0.30 M Fe2+ bath. The back side and front side composition of the deposits were analyzed to evaluate the composition uniformity of the Fe–Ni alloys. Generally, the Fe content of back side of the deposits were higher than that of front side.Graphical