Abstract

To study the effects of an axial magnetic field on the discharge characteristics of Ar inductively coupled plasma, a set of discharge plasma generators was designed. The plasma parameters such as electron temperature and electron density were diagnosed with a Langmuir probe. The research showed that as the air pressure was 10 Pa, with the increase in axial magnetic field intensity, the electron temperature and electron density reduced continuously in the central discharge region, while the threshold power of discharge mode transition increased constantly. The analysis suggested that due to the circumnutation of charged particles acted upon by Lorentz force, the introduction of the axial magnetic field had a constraint effect on the particle movement and energy transfer and decreased the collision between the high-energy electron in the discharge sheath and the electron in the central region, thereby reducing the electron density and inductive coupling efficiency. From further analysis of the electron energy probability function, it could be found that in the E mode, the constraint effect of the axial magnetic field on electron motion was more obvious. The proportion of the high-energy electron (>27 eV) was apparently higher than that in the H mode, and the electron energy distribution was more even. This was caused by less electron collision.

Highlights

  • The radio-frequency inductively coupled plasma (ICP) discharge possesses high plasma density, low antenna radio-frequency voltage, and a simple device structure

  • To explore the effect laws of the axial magnetic field on discharge characteristics of ICP, a set of radio-frequency inductively coupled plasma generators that applied the axial magnetic field was built in this study

  • The probe system is controlled by the controller and matched computer software, and the plasma parameters are collected to calculate the electron energy probability function (EEPF)

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Summary

INTRODUCTION

The radio-frequency inductively coupled plasma (ICP) discharge possesses high plasma density, low antenna radio-frequency voltage, and a simple device structure. It has been widely applied in plasma fusion, light sources, plasma chemistry, and plasma processing of materials.. The effects of the magnetic field on discharge characteristics of inductive coupling are usually researched by changing the discharge pressure, radio-frequency power, electrode size and layout, match type, and so on.. To explore the effect laws of the axial magnetic field on discharge characteristics of ICP, a set of radio-frequency inductively coupled plasma generators that applied the axial magnetic field was built in this study. The change rules of electron temperature, electron density, power of E–H mode transition, and EEPF with the axial magnetic field were explored

Plasma discharge tube
Power matching system
Gas supply system
Axial magnetic field system
Plasma diagnostic system
RESULTS AND DISCUSSION
Effect of the magnetic field on electron temperature
Effect of the magnetic field on electron density
Effect of magnetic field on EEPF
CONCLUSIONS
Full Text
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