Abstract
Influences of the axial magnetic field and Faraday shield on the performance of RF produced plasma using a spiral antenna are investigated. The RF power and filling pressure dependences, antenna-plasma coupling, Ar line intensities and spatial profiles of plasma parameters are studied. With the magnetic field and/or without a Faraday shield, the threshold input power for plasma initiation is lowered and the antenna-plasma coupling is improved. In addition, a collisionless heating mechanism is suggested. With the increase in the applied magnetic field, the ion saturation current increases and shows a peaked radial profile; in the low-pressure range it shows a nearly flat axial profile.
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