Effects of atmosphere composition during direct ultraviolet-light patterning of solution-deposited In2O3 thin film transistors

Abstract

Sol-gel synthesis is widely used to fabricate metal oxide thin films by solution, but it requires high-temperature thermal annealing to fully convert precursors to metal oxides. Exposure to Ultraviolet (UV) light before thermal annealing of precursor films has been shown to reduce the conversion temperature, with the added benefits of film patterning when done through a shadow mask and improved device performance. However, the mechanism by which UV exposure under different atmospheric compositions affects the properties of metal oxide films after thermal annealing has not been investigated. Here, we control the atmospheric composition during UV-patterning—prior to high-temperature thermal annealing—of In2O3 sol-gel films which serve as the semiconductor in thin-film transistors. Despite all films being annealed at 250°C in air after UV patterning, films exposed to UV under oxygen-containing atmospheres have higher metal-oxygen-metal bonding and exhibit higher transistor mobility compared to the films exposed to UV under N2 atmosphere. The origin of the effect of atmospheric composition on mobility is studied through X-ray photoelectron spectroscopy (XPS) and Fourier-transform infrared spectroscopy and is revealed to be the result of the reformation of the nitrate species in the films under more oxidizing atmospheres during UV exposure. These nitrates can be completely removed by thermal annealing, facilitating more complete metal-oxygen-metal bond formation, which is reflected in higher OI XPS signal and transistor mobility. In contrast, films processed under N2 atmosphere during UV exposure contain nitrite species that cannot be removed by thermal annealing, resulting in less metal-oxygen-metal bond formation and lower mobility.