Effects of argon dilution of an ethanol/hydrogen gas feed on the growth of diamond by hot-filament chemical vapor deposition

Abstract

We studied the effects on the growth kinetics and properties of diamond and carbon-like diamond films obtained by the introduction of argon at low to high concentrations (0–85 vol.% Ar) into the feed mixture (ethanol and hydrogen) of a hot-filament chemical vapor deposition (CVD) reactor. Scanning electron microscopy (SEM) analysis revealed that the addition of argon induces an increase in the diamond grain size, and increases the flaws between the grains and the density of vacancy defects. Well-faceted diamond films of good quality (measured by Raman spectroscopy) have been obtained using up to 65 vol.% of argon in the gaseous mixture, while higher concentrations (85 vol.% Ar) produce diamond-like carbon or other complex carbon structures. We also observed an increase in the diamond growth rate with argon addition that was associated with an increase in carbon free radicals (up to ∼40 vol.% Ar) or to the increase in the filament temperature necessary to keep the substrate temperature constant at higher Ar concentrations (above ∼40 vol.% Ar). Room temperature photoluminescence spectroscopy also confirmed that argon addition increases the density of vacancy defects in the diamond structure.