Abstract
ZnMgO films were prepared at room temperature on freestanding diamond (FSD) substrates with and without ZnO buffer layers by radio-frequency (RF) reactive magnetron sputtering method. The effects of annealing treatment and ZnO buffer layers on the structural, optical, and electrical properties of the ZnMgO films were studied by X-ray diffraction (XRD), UV-visible spectrophotometer, and electrical measurements. The experimental results suggested that the annealing treatment and buffer layer were helpful to improve the crystalline quality of ZnMgO/diamond heteroepitaxial films.
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