Abstract
The SnO thin films were deposited at low RF power densities by RF magnetron sputtering. According to XRD and XPS analyses, the SnO thin film comprised nanocrystalline orthorhombic SnO with a (110) orientation. Reducing RF power density resulted in better nanocrystallinity, changing hydrophobicity to hydrophilicity, and increasing the optical transmission in the UV–vis–NIR region. After annealing, the SnO thin film favored p-type conductivity and hydrophilicity. As the annealing temperature increased, the coexistence of nanocrystalline orthorhombic SnO and tetragonal SnO2 in the film clearly increased the optical transmission in the ultraviolet region. The SnO thin films after annealing at 500℃ in vacuum and N2 (200sccm) exhibited a higher hole mobility and a better optical selection in the ultraviolet region, respectively.
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