Abstract
Zr46Ti26Ni28 thin film metallic glass was fabricated by radio frequency magnetron single target sputtering on Si and stainless steel substrates. The as-deposited film was found to be fully amorphous with high glass transition and crystallization temperatures of 466°C and 502°C, respectively. Its hardness progressively increased from 6.2GPa to as high as 11.1GPa when subjected to annealing near the glass-transition temperature at 450°C. It was also of good adhesive strength and scratch resistance after the annealing treatment at 400°C. Transmission electron microscopy results revealed annealing-induced nanocrystals that accounted for such superior mechanical properties. With the above unique properties, Zr–Ti–Ni thin film metallic glass has the potential for the fabrication of high strength micro parts and protective coating.
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