Abstract
Disk-type resonators employing in-plane resonant modes have a great impact on the application for high-sensitive mass sensing because of the high quality factor (Q) in atmospheric pressure. In this paper, we had fabricated disk-type resonators for two types of in-plane vibration modes with single crystal silicon (SCS), and the frequency properties were experimentally measured. Furthermore, modal analyses have been performed using finite element method for the structure model of the disk-type resonators under the conditions with different crystal orientations of SCS. We have examined the effects of the crystal orientation of SCS on the frequency properties of disk-type resonators for two types of vibration modes by the experimental and numerical analytical methods.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
