Abstract
The effects of post-thermal diffusion of Al into heavily Al-doped ZnO (AZO) on its electrical, optical, and structural properties were investigated. Notably, the thermal diffusion of Al led to a significant enhancement of the optical transmittance-e.g., the transmittances at 550 nm were 90.4% and 96.7% before and after Al thermal diffusion, respectively. The structural analysis revealed that the improved optical transmittance was due to the combined effects of improved crystallinity, smoother surface, and the presence of transparent Al-O. However, the electrical properties of the AZO films after Al thermal diffusion were degraded-e.g., the sheet resistance was increased by 24% after thermal diffusion, which might be attributed to the generation of internal defects due to the heavy Al doping.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
