Effective passivation of porous silicon optical devices by thermal carbonization

Abstract

Nanostructured porous silicon (PS) optical filters have been proposed for their use in biological and chemical sensing applications. PS, however, presents a reactive surface that must be adequately passivated in order to achieve the required chemical stability mandatory for sensing applications. In the present work, thermal carbonization (TC) by acetylene decomposition is shown to provide effective passivation of a PS internal surface. Thermally carbonized PS optical filters are stable even in strong oxidizing environments such as absolute ethanol. Moreover, it is shown that the TC process, as opposed to more commonly used oxidation treatments, has only minor effects on the optical properties of PS. Thus, the optical performance of PS interference filters is preserved after the carbonization process. In addition, the hydrophilicity of the PS device surface can be adjusted by setting the appropriate TC process temperature. These results show that it is possible to produce low-cost, reusable, chemically stable PS optical devices for sensing applications.