Effective p+-Doping of a-Si:H and a-Sic:H Layers by Plasma Assisted Boron Diffusion

Abstract

ABSTRACTDoping of a-Si:H and a-SiC:H has been performed by plasma enhanced boron migration from thin (5–30 nm) Si0.2B0.8 layers on top of the substrate into the growing i-film. Transport coefficients for this plasma assisted diffusion (PAD) evaluated from SIMS profiles (D* = 10−15 … 10 cm2/s for a-Si:H, 10−15 cm2/s for a:SiC:H) by far exceed those for thermal diffusion after film deposition (10−21 cm2/s). Boron profiles are strongly governed by deposition parameters like substrate temperature, types and energies of radicals growing the film. Boron migration can be modelled assuming particle extraction from the network to the surface by bombardment of ions and atoms and high surface mobility of BHx radicals as a result from interaction with the plasma. Temperature dependent dark conductivity measurements show doping efficiencies comparable to B2H6 gas phase doping, but leaving plasma parameters optimized for i-film Leposition unchanged. Thin a-SiC:H layers are effectively p+-doped without affecting transmission, as no layer is optically detectable after PAD.