Abstract
Scanning probes are widely used in industry due to high precision and efficiency. However, the insufficient dynamic performance of the probe, especially the first-order natural frequency, makes the measurement results under high-speed scanning easily interfered by the resonance effect. Based on Lagrangian dynamic model of the probe, this paper proposes a multi-objective optimization method for the three-dimensional (3D) structure, including a two-dimensional (2D) elastic mechanism and a ceramic stylus, and obtains an optimized probe with highly increased first-order natural frequency and sensitivity. The evaluation of the probe dynamics and scanning-deviation prediction shows that the optimized probe has a higher upper velocity limit within the same allowable measurement deviation and a better tolerance to resonance. Compared with the original probe, the optimized probe significantly suppresses the low-amplitude and high-frequency resonance components caused by the axial runout of the linear guide and improve the quality of the system response signals.
Published Version
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