Abstract

ABSTRACT To reduce the theoretical measurement error caused by a high acceleration in fast ultra-precision laser heterodyne interferometry, a model is proposed. This model is about ho w the displacement measurement precision is affected by the acceleration of the measuring prism in a multi-pass heterody ne interferometer. In the model, the integrals of Nv 2 /c and Nax /c are added on the basis of a conventional heterodyne interferometer model. It shows, that in the conventional model the measurement error increases with in creasing measurement acceleration. An er ror compensation method is proposed, which uses numerical integration to obta in the real time speed an d acceleration. Corrected data can be acquired by using an error correction formula. Simulation results show, that the measurement error can be reduced by this method from 10nm to 0.03nm when the displacement of the measuring prism is 500mm and th e uniform acceleration of the measuring prism of a double pass interferometer equals g. Keywords: Laser heterodyne interferometry, multi-pass, acceleration, ultra-precision measurement, compensation method

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