Abstract
ABSTRACT To reduce the theoretical measurement error caused by a high acceleration in fast ultra-precision laser heterodyne interferometry, a model is proposed. This model is about ho w the displacement measurement precision is affected by the acceleration of the measuring prism in a multi-pass heterody ne interferometer. In the model, the integrals of Nv 2 /c and Nax /c are added on the basis of a conventional heterodyne interferometer model. It shows, that in the conventional model the measurement error increases with in creasing measurement acceleration. An er ror compensation method is proposed, which uses numerical integration to obta in the real time speed an d acceleration. Corrected data can be acquired by using an error correction formula. Simulation results show, that the measurement error can be reduced by this method from 10nm to 0.03nm when the displacement of the measuring prism is 500mm and th e uniform acceleration of the measuring prism of a double pass interferometer equals g. Keywords: Laser heterodyne interferometry, multi-pass, acceleration, ultra-precision measurement, compensation method
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
