Abstract
The effects of ZrO 2 additions on the physical as well as electrical properties of the MgO thin films, deposited on slide glass substrates by electron beam evaporation, have been investigated. As the ZrO 2 molar concentration ratio increased, the intensity ratio of the (200) peak relative to the (111) peak was observed to increase with a corresponding peak shift to lower diffraction angles as a result of the substitutional solid solution between Mg and Zr. The film density, which was calculated from the measured refractive index and the equivalent refractive index, had a maximum at a ZrO 2 molar concentration ratio of 3 mol% and gradually decreased and saturated with increasing ZrO 2 concentration ratio. At a ZrO 2 molar concentration ratio of 3 mol%, the deposited MgO-ZrO 2 layer exhibited lower discharge voltages compared to a conventional MgO layer, probably due to its increased density.
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