Abstract
The strain rate sensitivity of nanohardness of a magnetron sputtered Ti-Zr-Cu-Ni-Al thin film metallic glass has been investigated. Nanoindentation tests were performed at various loading rates on thin film metallic glasses with three different Zr content. Replacement of Ti with Zr has led to an increase in hardness due to higher atomic packing efficiency and stronger bonds. A non-serrated p-h curve independent of Zr content and a positive dependency of nanohardness on Zr content was observed. The negative strain rate sensitivity and enhancement of strain rate sensitivity with Zr content were discussed.
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