Abstract
Full densification of Y 2 O 3 is challenging and requires a very high sintering temperature (above 1700 °C). In this study, the effect of ZnO and TiO 2 dopants on its densification was investigated, showing that both dopants lowered the sintering temperature and improved the process. Moreover, ZnO promoted the grain growth, while TiO 2 inhibited it; hence, the ZnO TiO 2 co-doping and the change in the ZnO/TiO 2 ratio allowed the control of the sintered body microstructure while maintaining high densification. Since Y 2 O 3 has a higher plasma erosion resistance than conventional Si-based materials, the plasma dry etching resistance of the sintered Y 2 O 3 was also evaluated and found superior due to the improved densification and controlled grain size of the doped samples.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
