Abstract
This paper presents the fabrication process and characterization process of zinc (Zn) doped nickel oxide (NiO) thin film. The main objective of this research is to investigate the electrical and structural properties of Zn-doped NiO thin film using sol-gel spin-coating method. Zn-doped NiO thin film was prepared by using spin-coating method. The samples were prepared at different doping parameters, which are undoped NiO, 0.5 at.% Zn-doped NiO, 1.0 at.% Zn-doped NiO, 1.5 at.% Zn-doped NiO and 2.0 at.% Zn-doped NiO. The studies of structural properties of the samples were conducted by using an X-ray diffraction. The optical properties of the samples were characterized by using ultraviolet-visible spectroscopy. The spectra of transmittance and absorbance of the samples were studied. The humidity sensing properties of the samples were conducted using humidity chamber and sensor measurement system.
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