Abstract

The tribological properties of hydrogenated amorphous carbon (a-C:H) films in ambient air were investigated from the microstructural point of view. a-C:H films with various microstructures (polymer-like, diamond-like, and graphite-like structures) were prepared, and the thickness of water adsorption layers on the films was measured. The adsorption behavior of water molecules on a-C:H films could be expressed with the Brunauer-Emmett-Teller (BET) isotherm, while the thicknesses of icelike and liquidlike water layers adsorbed on the films could be determined using the BET parameters C and nma. The polymer-like films exhibited the thickest icelike and liquidlike water adsorption layers, which decreased as the film structure changed to a diamond-like or a graphite-like structure. A strong relationship was observed between the thickness of water adsorption layers and the surface oxidation of the a-C:H films. The friction coefficient of the films in ambient air can be well explained by the surface oxidation and the thickness of water adsorption layers. Polymer-like films showed high friction coefficients due to the formation of a thick water layer on the films originated from the high surface oxidation of the film surface, whereas the graphite-like film exhibited a low friction coefficient due to low oxidation and a thin water adsorption layer. Furthermore, friction tests between the a-C:H films with different microstructures under ambient air were performed to determine the lowest friction pair in various relative humidities (RHs).

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