Effect of vibration on surface and tool wear in ultrasonic vibration-assisted scratching of brittle materials

Abstract

The purpose of this paper is to investigate the effects of vibration on the surface and tool wear in scratching of brittle materials. In the past, research methodology of vibration cutting has mainly involved vibrating tool parallel to cutting direction. In this paper, a new approach is proposed by an elliptic ultrasonic vibrating workpiece. It presents the fundamental principles and mechanism of ultrasonic machining together with experimental results of scratching of polysilicon with parallel and vertical ultrasonic vibration assistance. With the elliptic ultrasonic vibration assistance, the brittle material would be more likely to be ductilely removed than in conventional condition, and tool wear could be decreased in scratching of brittle materials.