Effect of various surface treatment for enhancing adhesion of Au on parylene coated protein chip

Abstract

Summary form only given, as follows. We describe a method for enhancing adhesion of Au on parylene-c coated surfaces For the ion-beam and plasma effect for enhancing surface energy, ion beam treatment and atmosphere plasma treatment were performed for the modification from hydrophobic to hydrophilic surface, piranha, PBST and BSA treatment were performed Tape-test analysis and piranha treatment were used for qualitative adhesive comparison of Au on parylene-c substrate. Contact angle measurements were performed before and after various treatments. Surface roughness and microstructures were observed using FESEM and AFM. From the results, the increase in adhesion is attributed to increased surface energy rather than hydraulic surface characteristics.