Effect of various masked patterned tools during micro-electrochemical texturing

Abstract

Micromachining technology plays an important role for enhancing the interfacial properties of surface texture by precisely controlling the shape and size of textured surfaces. Maskless micro-electrochemical texturing is a unique method for the generation of surface textures using different masked patterned tools with good shape and size. Fabrication of surface textures depends on suitable masked patterned tools, which are used in maskless micro-electrochemical texturing process. This article presents the effect and capability of six types of masked patterned tools with AZ4903, AZ4620, AZ1415H, synthetic prolite enamel, PMMA (Polymethyl methacrylate) and SU-8 2150 masks for the generation of textured samples utilizing developed experimental setup of maskless micro-electrochemical texturing. AZ4903, AZ4620, AZ1415H, synthetic prolite enamel and SU-8 2150 masked tools are used for fabrication of micro circular patterns and PMMA masked tool is used for varactor micropattern generation using maskless micro-electrochemical texturing. The developed maskless electrochemical micromachining (EMM) setup consists of various sub-systems, namely EMM cell, workpiece and tool fixture devices, electrical connections and vertical cross flow electrolyte circulation systems. The effect of applied voltage, inter electrode gap and flow rate is investigated on textured characteristics i.e. overcut, machining depth and surface roughness(Ra) using six types of masked patterned tools during maskless micro-electrochemical texturing process. From the experimental investigations, it is observed that SU-8 2150 masked patterned tool is most suitable for the generation of surface texture with higher machining accuracy and good surface quality than other masked tools. The achieved best textured characteristics using SU-8 2150 mask are overcut of 21.33 μm, machining depth of 26.36 μm and surface roughness of 0.0672 μm during maskless micro-electrochemical texturing.