Abstract
The effect of deposition condition of top electrodes on fatigue of film capacitors has been investigated. As top electrodes were deposited by reactive dc sputtering at higher partial pressure in Ar and mixture gas and/or dc power on a Ru target, the initial hysteresis loops and fatigue performance of (PZT) films with electrodes were deteriorated more significantly. In contrast, a capacitor showed fatigue endurance comparable to the best fatigue property observed in capacitor. These phenomena were attributed to the sputtering damage generated at the top interface during depositing the top electrodes, which seemed to be caused by oxygen ion bombardment. © 2002 The Electrochemical Society. All rights reserved.
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