Abstract
ABSTRACTThe influence of film thickness and polymer molecular weight on the diffusion coefficient of a series of small molecule penetrants (including water, benzene, and trifluoroacetic acid) in thin films of two different model photoresist polymers (poly(p-hydroxystyrene) and bis-triflouromethyl carbinol substituted poly(norbornene)) has been studied using vapor sorption experiments via quartz crystal microbalance (QCM) methods. Diffusion coefficients for films ranging in thickness from approximately 1 μm to 50 nm were determined. It is observed that the diffusion coefficient of small molecules in a thin polymer film is a strong function of film thickness, and that the diffusion coefficient decreases drastically as film thickness is reduced below a critical thickness value. This critical thickness value is found to be a function of both the type of polymer used and the polymer molecular weight.
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