Abstract
The effect of soft X-ray irradiation of diamond-like carbon films in vacuum was investigated using synchrotron radiation (SR). Etching and the desorption of hydrogen upon SR exposure in vacuum occurred in highly hydrogenated diamond-like carbon (H-DLC) films; these processes were not observed in the irradiation of a low-hydrogenated DLC film. The extent of decrease in hydrogen content due to SR exposure was found to decrease with increasing the etching ratio of the H-DLC film. This indicates that hydrogen desorption from the H-DLC films competed with the etching process. Namely, the modified surface, in which hydrogen content was decreased by SR exposure, was immediately removed from the H-DLC film that had a high etching rate.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
