Abstract
In a recent work, rotating polarizer compensator ellipsometer (RPCE) with a fixed analyzer was proposed. Three different ellipsometric configurations were presented by considering different speed ratios of the rotating elements. It was shown the speed ratio 1:1 corresponds the minimum error in the calculated optical parameters of c-Si and GaAs samples. In this paper, we investigate the effect of the fixed analyzer alignment on the ellipsometric parameters \(\psi \) and \(\Delta \) in RPCE structure with speed ratio 1:1 to find out the optimal angle at which the analyzer must be oriented to minimize the uncertainty in the calculated ellipsometric parameters. The uncertainties in the two ellipsometric parameters due to the uncertainties in Fourier coefficients are studied in details and it is found that an analyzer angle in the range \(40^{\circ }\)–\(50^{\circ }\) corresponds to the minimum uncertainty in \(\psi \) and \(\Delta \) and therefore this range is recommended.
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