Abstract
We report on the superconducting properties of nanocrystalline molybdenum nitride thin films grown by reactive DC sputtering at room temperature with a N2:Ar mixture. Thin films grown using 5% N2 concentration display Tc = 8 K, which is gradually reduced to 5.8 K for 30% N2 concentration, producing changes in nitrogen stoichiometry of the samples from Mo2N to Mo2N1+x (0 ≤ x < 0.4). The Tc is abruptly reduced and disappears for N2 concentration between 30% and 40%, which can be attributed to an increment in the disorder due to phase coexistence between cubic γ-Mo2N and non-superconducting amorphous MoN (dominant for N2 concentration >40%).
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