Abstract
The effect of heat treatment on the crystal structure and optical properties of films of tungsten oxide WO3 has been studied. The films have been synthesized on a substrate made of quartz glass by reactive magnetron sputtering on a DC. The samples studied contained WO3 single layers and double layers of the WO3/TiO2 and TiO2/WO3 type. Each sample passed sequential heat treatments for 1 h: in air at 500°C, under vacuum at 700°C (residual pressure ≤5 × 10–5 Torr); and in air, at 500°C. It was found that at each stage of processing a polymorphic transition takes place in the WO3 films, which is affected by the orders of layers on the substrate.
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