Abstract
Functional nonstoichiometric La0.6Ca0.4CoO3perovskite thin films were deposited on theepi-polished [001] MgO substrates by the electron ablation process (PED - pulsed electron deposition) in low oxygene pressure conditions (~7 x 10-3Torr). Deposition process was performed for about 4 hours with the repetition rate of 5 Hz that gave about 72 000 pulses for each sample. By adjusting both the target-substrate distance in the working chamber (70 - 80 mm) as well as the electron energy (10 - 14 kV) it is possible to affect the microstructure and quality of obtained thin films. This paperrelates to the influence of the single pulse electron energy (discharge) on the structure of La0.6Ca0.4CoO3thin films investigated by means of scanning electron microscopy, transmission electron microscopy and atomic force microscopy. The chemical compositions were also examined using energy dispersive spectroscopy. Multiple linear scratch tests allowed to determine the thin films adhesion to the substrates.
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